Glossary
AB, AE & T
Alberta, Advanced Education and Technology, a department within the Government of Alberta. www.advancededucationandtechnology.gov.ab.ca

Alberta
The Province of Alberta within Canada. www.gov.ab.ca

AMIF
Advanced Microsystems Integration Facility, as located at the University of Calgary within the Department of Electrical & Computer Engineering as located at CCIT Building, 2500 University Drive NW, Calgary AB Canada T2N 1N4, Tele: 403 210 8421. www.atips.ca/AMIF

Applicant
An individual, university, research institute or SME who contemplates the submission or prepares an Expression of Interest directed at a MSTRI Program.

ATIPS
Advanced Technology Information Processing Systems, as located at the University of Calgary within the CCIT Building at 2500 University Drive NW, Calgary AB Canada T2N 1N4, Tele: 403 210 9696. www.atips.ca

Cash
Refers to actual money as provided by MSTRI or a MSTRI Participant and deposited into a MSTRI Project Account where the expenditure of such monies can be authorized only by the Principal Investigator and used strictly for the purpose of purchasing eligible salary/benefits, goods and services required for furthering the completion of the MSTRI Project workscope.

CIPO
Canadian Intellectual Property Office, a Special Operating Agency (SOA) associated with Industry Canada is responsible for the administration and processing of the greater part of Intellectual Property in Canada including: patents, copyrights, trademarks, industrial designs and integrated circuit topographies. http://strategis.ic.gc.ca

CMC Microsystems Inc.
Is a federally incorporated non-profit corporation that provides microsystems researchers with industry-calibre design resources, access to state-of-the-art manufacturing technologies, and support services. www.cmc.ca

Commercialization (or commercialize)
Actions intended to attract investment to be directed against intellectual property rights, with the expectation that the entity gaining the rights will exercise them to develop products and/or services for sale to customers.

Core
A pre-designed block that requires little or no further development or verification effort to use as an component in a complex System–on-Chip (SoC) design.

Deliverables
Refers to MSTRI Project outcomes, as defined within Schedule "A" of the corresponding MRC, to be provided to MSTRI by MSTRI Participants in exchange for receiving MSTRI financial support. Such Deliverables can include but are restricted to the prototype and written reports, where written reports may include Progress and Final Reports as prepared by the Principal Investigator and a Final Report and Annual Commercialization Reports as prepared bt the Industry Sponsor or other entity as deemed appropriate.

Device
A system which is designed to express a specific functionality that is comprised of one or more components, where at least one of the components is derived through micro/nano fabrication.

DPC
Direct Project Cost, refers to the full cost of a good or service as incurred by a Project Participant with funds not originating from the MSTRI Project Account where the full benefit of the good or service is applied strictly against the completion of the MSTRI Project work scope.

DSM
Deep Sub-Micron, is a nano-fabrication process that creates features with dimensions less than 0.5-micron.

Embedded Metallization
The deposition of different metals inside a microfluidic channel making an array of electrodes to transport, identify, and analyze various biological materials/agents/cells in a microfluidic chip.

Etch
A chemical process used to selectively remove parts or layers during micro-fabrication.

Expression of Interest
Is a means for an applicant to register a MSTRI Prospect with MSTRI and requires the completion a web-based registration form (Form) and the an email submission of a completed summary (Summary).

Faculty
Refers to the Faculty of Engineering at the University of Alberta which office is located at Room E6-050 Engineering Teaching & Learning Complex (ETLC) at 9107 – 116 Street Edmonton, AB Canada T6G 2V4, Tele: 780 492 5398. www.engineering.ualberta.ca

Fast-Tracked
Fully approving an EI for funding without the need to submit a full MSTRI Proposal because the Prospect(s) have succinctly describe all the necessary details of the proposed project within the submitted EI Summary that the MPEC members unanimously agreed that they have sufficient information to confidently give their badge of approval for the funding of the proposed project.

Fixturing
A facility used in the testing of a packaged microsystem that involves extending the inputs and outputs to an arrangement of accessible terminals for the application and analysis of test signals.

Form
Is the web-based on-line registration component of the two component application process (Form and Summary) relating to the submission of an Expression of Interest by an Applicant under the MSTRI Project (Technical) Program

HQP
Highly Qualified Personnel, which are individuals who possess strong background, skills, and experience in a particular field, making them a valued asset to industrial and research organizations.

IC
Integrated Circuit, which are an interconnection of multiple electronic circuit components fabricated on a semiconductor substrate. Used in reference to microelectronic chips.

ICT
Information and Communications Technology

Industry Sponsor
Refers to a SME or research institute which upon execution of a MRC becomes a Project Participant and as such has agreed to provide resources (employee time, equipment use, materials or finances), know-how or intellectual property to the MSTRI Project with the intent to further develop or commercialize the prototype following its termination.

In-kind
Is a donation of goods and/or services to a MSTRI Project by a Project Participant. The value of an in-kind contribution is determined with reference to standard pricing for the good or service, where this exists, or otherwise the "next best customer" price times the fraction of use to which the good and service is used in completing the work scope during the term of the MSTRI Project.

Innovation Program
Is a three-year, $33 million program designed to support the strategic plan by encouraging innovation within the Government of Alberta and by providing funding support for projects that meet the program requirements, criteria, and expectations. MSTRI received funding from the the Unleashing Innovation Stream which supports initiatives that facilitate the application of new knowledge and accelerate the adoption of innovation for the benefit of Albertans. www.innovation.gov.ab.ca/inno-program/

Intellectual Property
Tangible property rights relating to intellectual assets as provided by statutory protection within defined jurisdictions, which include patents, trademarks, designs, copyright and trade secrets.

Intellectual Property Policy
Is a written policy, as prepared and administered by a university, research institute or company which is typically a condition of employment that describes the responsibilities, ownership and exploitation rights associated with Intellectual Property as created by an employee or contractor.

Interval
A period of time, as specified by MSTRI, during which MSTRI will receive and gather Expressions of Interests for subsequent review and competitive comparative assessment.

Invention
Is an idea or concept that can be demonstrated to be useful, novel and non-obvious to one with ordinary skilled-in-the-art and as such qualifies as appropriate subject matter to be described within a patent application or subsequent issued patent.

IRAP
Industrial Research Assistance Program, is a program administered by the National Research Council of Canada (NRC) which offers assistance to SMEs for the purpose of assisting the development of new technology for enhancing existing or creating new products. www.nrc.ca/irap

Know-how
Knowledge as gained by an individual through research and experience which characterizes an individual as an expert

Laboratory-on-a-Chip
A lab-on-a-chip (LOC) is a microfluidic device that enables the preparation and subsequent testing of samples as contained within minute volumes of liquids or gases, by systematically flowing through a layout.

Layout
The physical implementation of components and interconnections that are characteristic to a particular microsystem.

Leverage
Financial contributions (whether cash, DPC or in-kind) to MSTRI Projects as provided by MSTRI Participants to ensure that the approved work scope and other defined deliverables are completed.

MAB
MSTRI Advisory Board, is group of individuals as identified and appointed by the Faculty who meet on a minimum quarterly basis to recommend policy and guidance in support of MSTRI, the programs it offers and the MSTRI Director. These individuals offer representation from academia; government and the regional micro/nano system industry.

MANCEF
Micro and Nanotechnology Commercialization Education Foundation, is an organization which enables the global creation, exchange, and dissemination of knowledge vital to people, organizations, and governments interested in the commercialization of miniaturization technologies. www.mancef.org

Mask
The photographic film used to isolate portions of a wafer during a micro fabrication process. A photo-mask may be used to control the patterning of a layer of photoresist or other material on the surface of the wafer that defines the area of action for a particular process step.

MEMS
Micro Electro Mechanical Systems are devices comprised by integrating a microsystem with electronic signal processors for the purpose of detecting mechanical energy from the outside world, converting it to electrical signals, processing the signals and generating an output in the form of electrical and mechanical energy.

Methodology
The structured series of steps used in the design of microsystems.

Microfabrication
Using a machine or process to construct specified features on a substrate through the addition or removal of material where such feature size is within the dimensions and tolerances of 0.5 to 100 micros.

Microfabrication Use Account
A sub-account to a MSTRI Project Account, which is setup within the NanoFab or AMIF accounting systems which provides the funds as set out within the MRC for the sole purpose of using NanoFab or AMIF equipment or acquiring materials in accordance to the applicable MSTRI Project Microfabrication Fee schedule.

Microfluidics
Is the flow of fluids within channels, with dimensions of 100 microns or less, for the purpose of achieving a desired outcome or application.

Micro-machine
Structures and machines with micron feature sizes. These machines can have many functions, including sensing, communication and actuation.

Micro-mirror
Mirrors of a very small size as fabricated on a chip as used for the purpose of steering/scanning a light beam at micron scale.

Micro/nano
Refers to either a microsystem or nano-system interchangeably.

Micro/nano Interface
The means of connecting desired output from a nanosystem to a microsystem in order to enable or exert control over the performance of the nanosystem.

Microsystem
Is a general description of a device, which is comprised of one or more components where at least one component includes functional features, which have been created through the manipulation of materials or structures (Microfabrication) with dimensions and tolerances in the range of 0.5 to 100 micros. Microsystems include photonics, micromachining, microactuators, microfluidics, microsensors and mechanical aspects of MEMS devices.

Modeling
The capture of the physical and functional behaviour of a technology or component within a computer program that is then used to test its response to various stimuli without requiring actual realization.

Module
An interconnected subsystem of a number of microsystem components, usually designed to form a building block for more complex systems.

MPAR
MSTRI Proposal Assessment Reviewers, are individuals who have specific expertise relating to micro/nano fabrication, application and business development that are contracted by MSTRI to review, comment and provide a recommendation to MSTRI whether to grant final approval of a MSTRI Proposal.

MPEC
MSTRI Proposal Evaluation Committee, a group of individuals as identified and appointed by the MSTRI Advisory Board, who provide their knowledge, expertise and collective opinion during the MSTRI Prospect and Proposal evaluation and approval process.

MRC
MSTRI Research Contract, is a written formal agreement as executed between MSTRI, the University and other MSTRI Participants which describes the work scope to be completed, budget, financial considerations, milestones, deliverables and other understandings between the various Project Participants relating to the execution, completion and continuing obligations associated with a MSTRI Project.

MST
Microsystem Technology, is a more general statement of MEMS including optical and fluidic systems. MST is a more common term than MEMS in Europe and Japan. Similar to MEMS with or without the electronic circuitry (e. g. optical, mechanical or fluidic structures.

MSTRI
MicroSystems Technology Research Initiative, a pseudo independent economic development initiative as established in 2000 with a mandate to support pre-commercial activities presented by regional strengths in micro/nano systems research outcomes. www.engineering.ualberta.ca/mstri

MSTRI Phase I
Refers to the initial round of funding received by MSTRI from MSTRI Funding Sponsors where the term extended from October 2000 to September 2003 and resulted in the sponsorship of fifteen MSTRI Projects (Technical) and two MSTRI Projects (Non-Technical).

MSTRI Phase II
Refers to the second round of funding as received by MSTRI from MSTRI Funding Sponsors where such term will extend from October 2005 to September 2008 and requires MSTRI to development, promote and manage three MSTRI Programs.

MSTRI Director
The individual as employed by the University of Alberta under the Faculty of Engineering to manage the day-to-day operations of MSTRI and the programs its supports and to regularly report these activities to the Faculty, MAB and MSTRI Funding Sponsors. rlemieux@ualberta.ca

MSTRI Funding Sponsors
Funding in support of MSTRI and the programs it supports is provided under WEPA with the contributing parties being Alberta, Innovation & Science, Alberta Innovation Program as administered by Alberta, Innovation & Science and Western Economic Diversification, Canada. The University of Alberta provides in-kind support by way of office space; administrative, accounting and legal assistance, contract management and web support.

MSTRI Participant
Refers to any individual, university or Industry Sponsor that participates in a MSTRI Project.

MSTRI Project
An approved MSTRI Proposal following the execution of a MRC.

MSTRI Project Account
A research trust account as setup within the University accounting system, which is allocated the funds as approved by MSTRI for a given MSTRI Project and any other Cash commitments to be provided by other MSTRI Participants as per the expressed terms contained within the MRC.

MSTRI Proposal
A formal request for funding as prepared by an Applicant on a template document provided by MSTRI, following a successful review of a MSTRI Prospect by the MPEC.

MSTRI Prospect
Is a preliminary request for funding in the form of a completed Expression of Interest as submitted to MSTRI by an Applicant and subsequently accepted.

MSTRI Request
Is the Cash component of a proposed budget to be supplied by MSTRI within an Expression of Interest, MSTRI Proposal or subsquent approved MSTRI Project.

Multi-technology, Multi-domain
The integration of all or some of the following subsystems: MEMS, microfluidics, optoelectronics, photonics, microelectronics

nanoBridge
The evolution of MSTRI in Phase III. It increases the initiative’s alignment with changes in the Alberta Innovation System and incorporate improvements to program and project management processes.

NanoFab
Nanofabrication and Microfabrication Facility as located at the University of Alberta within Room 1-060 ECERF Building, 9107 – 116th Street, Edmonton AB, Canada T6G 2V4., Tele: 780 492 7923. www.nanofab.ualberta.ca

Nano MEMS Edmonton
Is a registered public-private partnership dedicated to fostering the development and growth of micro - and nano-based commercial enterprise within the Edmonton, Alberta, Canada region. Lead partners include: Micralyne Inc., Bigbangwidth Inc., the University of Alberta, Edmonton Economic Development Corporation (EEDC) and the National Institute for Nanotechnology (NINT). Cluster participants include over two dozen established and early-stage MNT/MEMS companies. www.nanomems.org

Nanofabrication
Is the act of using a machine or process to construct specified features on a substrate through the addition or removal of material where such feature size is within the dimensions and tolerances of 0.1 to .001 micros.

Nanotechnology
Is a broad description of an area of science and technology where activities involve the manipulation of materials or structures with dimensions and tolerances in the range of 0.1 nanometre to 100 nanometres. The resulting outcomes of these manipulations offer novel and significantly different physical, chemical and biological properties, phenomena, and processes due to their nano-scale dimensions.

NINT
National Institution for Nanotechnology, is a National Research Council of Canada research centre as located in Edmonton, Alberta with a mandate to identify, research and exploit new Nanotechnology developments . www.nint.ca

Notice of Disqualification
A document forwarded by MSTRI that informs an Applicant that an Expression of Interest as received from the applicant has failed meet MSTRI’s requirements following a review by the MSTRI Director and MPEC.

Optical Routing
The routing of signals implemented via optical switches as opposed to electrical switches.

Optical Switch
A switch that enables signals in optical fibres or integrated optical circuits (IOCs) to be selectively switched from one circuit to another.

Optoelectronics
A subset of photonics concerned with the application of electronic devices that interact with light, including invisible forms of radiation such as ultraviolet and infrared.

Packaging
The process of enclosing a chip in a structure that facilitates connections to the larger subsystem, often used in relation to a microsystem where the structure is plastic or ceramic and the connection is through a set of pins that are usually soldered to a printed circuit board. More generally, the package is designed to match the particular technology used for the chip and is intended to protect the chip from potentially harmful elements within the environment to which the chip or microsystem may be exposed as a result of its intended use.

PCT
Patent Cooperation Treaty, provides a means to file patent applications, receive examination and delay the expense of filing formal patent applications within applicant-selected treaty member jurisdictions worldwide (over 100 treaty members including Canada, US, UK etc.) through a two chapter prosecution process that is managed by the World Intellectual Property Office (WIPO) as located in Brussels, Belguim. www.wipo.int/patentscope/en/

Performance Indicators
Quantifiable variables as specified by MSTRI Funding Sponsors under which the short and long performance of MSTRI will be measured and judged.

Person Months
Refers to cumulative time dedicated by one or more persons towards the completion of a proposed project as expressed in months where one month is equivalent to 172 hours based on a 40 hour work week.

Example: For a MSTRI Project covering a one-year term where the Principal Investigator estimates a level of involvement for conducting project oversight of 3.25 hr/week results in an estimated commitment of 1.0 person-months (3.25 hr/wk*52 wk/yr* 1 yr = 169 hr/172 hr/person-month = ~1person-month)

Photo-mask
The photographic film (glass plate) which contains the masking pattern required for a particular wafer processing step (see Mask).

Photonics
The science and technology of generating, manipulating, transmitting, and detecting light. It is a field that encompasses optics, quantum optics, lasers, optoelectronics, imaging, optical information processing, materials science, and their applications.

Photoresist
Light-sensitive chemical agents used to form selectively protective masking layers during wafer processing. A photo-mask is used to define the areas of photoresist exposed to light, which are subsequently removed by a solvent, leaving the required pattern on the wafer surface. The entire process is called photolithography.

Principal Investigator
The lead researcher within a MSTRI Project who has full authority over technical decisions relating to the completion of the work scope and preparation/submission of Project Deliverables? A university based Principal Investigator will have full responsibility to the MSTRI Project including appropriate use of funds.

Process
A single or series of steps required to reliably produce a specified feature or outcome within a micro/nano system.

Project Manager
Is the lead contact within the Industry Sponsor who has authority over resource allocations including budget and scheduling relating to the completion of a MSTRI Project work scope and preparation/submission of Project Deliverables.

Project Team
A group of individuals, including and under the direction of the Principal Investigator, as gathered to execute a work scope that defines the basis of a MSTRI Project.

Prototyping
The implementation of a micro/nano system into device for the purpose of demonstrating proof-of-concept or verify its functionality in terms of the application to be served.

Reduction–to-Practice
Is the means of successfully demonstrating the utility of an idea or concept.

Research Coordinator
An individual within an academic setting that has been given the responsibility by the Principal Investigator to manage the day-to-day activities relating to the completion of a MSTRI Project.

Report of Invention (ROI)
Is a document, as typically required under an Intellectual Property Policy, that describes an idea or concept that offers the potential of being considered or can be demonstrated to be an Invention. www.uofaweb.ualberta.ca/tecedmonton/ROI.cfm

Response Date
Is the date following the deadline of an interval that MSTRI will conduct its best efforts for reporting back to applicants which MSTRI Prospects qualify for preparation and submission a formal MSTRI Proposal.

RSO Contact
An individual within a universities research services office whose duties and responsibilities relate to the processing of grants or research contracts corresponding to the research discipline described by the MSTRI Prospect or faculty/department under which the Principal Investigator is employed.

Small Times
Is the leading source of business information and analysis about micro and nanotechnology. and offers full news coverage through its business trade magazine, daily news Web site and weekly e-mail newsletter. www.smalltimes.com

SME
Small to Medium Sized Enterprise, which are companies as incorporated within the laws of Alberta or Canada which conduct there day-to-day business in Canada and employ less than 250 full time equivalent employees.

Software
Computer programs and data that are used, in conjunction with hardware, to simulate or implement a complete microsystem.

Summary
One of a two component process used for registering an Expression of Interest under the MSTRI Projects (Technical) Program, where this component involves the completion of a preformated document, as retrieved from the MSTRI website, and subsequently submitted by email.

System-on-Chip (SoC)
System-on-Chip. A large, complex integrated circuit with high functionality and performance. Often characterized by the presence of embedded processors, embedded memory, and a multitude of other components.

UA
University of Alberta in Edmonton, AB, Canada. www.ualberta.ca

UC
University of Calgary, in Calgary, AB, Canada. www.ucalgary.ca

USPTO
United States Patent and Trademark Office, is the body within the United States government Department of Commerce that manages the patent filing and prosecution process. www.uspto.gov

Universities
Refers to UA, UC and the University of Lethbridge collectively.

University
University of Alberta in Edmonton, AB, Canada. www.ualberta.ca

University of Lethbridge
University of Lethbridge in Lethbridge, AB, Canada. www.uleth.ca

Validation
The processes of comparing the behavior of a physical system against the original design specification.

Verification
The process of measuring the behavior of the system in relation to specific benchmarks.

Wafer
The thin (a few hundred microns) slice sawn from a cylindrical semiconductor crystal that serves as the substrate for the micro-fabrication of multiple individual integrated microsystems.

WD
Western Economic Diversification, which is a ministry within the Government of Canada. www.wd.gc.ca

WEPA
Western Economic Partnership Agreement, is an agreement as executed between WD and Alberta on December 5, 2003 that defines a four year cooperative effort to support economic growth and diversification in Alberta in the amount $50 miilion. www.wd.gc.ca/mediacentre/2003/dec05-01a_e.asp

Yield
The percentage of good microsystems compared to the total microsystems produced per wafer.